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Development of a compact optical MEMS scanner with integrated VCSEL light source and diffractive optics
Micromechanical reliability evaluation of mirror devices through applying accelerated electrostatic force
Electromechanically driven microchopper for integration in microspectrometers based on LIGA technology
Novel, highly sensitive chemical and biological sensors based on integrated MOEM and MEMS technologies
Optical characteristics of PZT thin film actuator-driven micro-optical scanning sensor with multilayer stacked device structure
Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench
Photovoltaic on-demand high-voltage pulse generator as an on-board power source for electrostatic actuator array