PROCEEDINGS VOLUME 3878
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION | 20-22 SEPTEMBER 1999
Miniaturized Systems with Micro-Optics and MEMS
IN THIS VOLUME

8 Sessions, 44 Papers, 0 Presentations
MOEM Devices  (5)
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION
20-22 September 1999
Santa Clara, CA, United States
MOEM Scanners
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 20 (2 September 1999); doi: 10.1117/12.361250
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 29 (2 September 1999); doi: 10.1117/12.361269
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 39 (2 September 1999); doi: 10.1117/12.361276
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 48 (2 September 1999); doi: 10.1117/12.361286
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 58 (2 September 1999); doi: 10.1117/12.361290
Micromirror Devices
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 68 (2 September 1999); doi: 10.1117/12.361291
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 80 (2 September 1999); doi: 10.1117/12.361292
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 90 (2 September 1999); doi: 10.1117/12.361293
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 101 (2 September 1999); doi: 10.1117/12.361251
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 112 (2 September 1999); doi: 10.1117/12.361252
MOEMS Switches/Shutters
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 124 (2 September 1999); doi: 10.1117/12.361253
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 131 (2 September 1999); doi: 10.1117/12.361254
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 136 (2 September 1999); doi: 10.1117/12.361255
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 144 (2 September 1999); doi: 10.1117/12.361256
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 155 (2 September 1999); doi: 10.1117/12.361257
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 164 (2 September 1999); doi: 10.1117/12.361258
MOEMS for Sensing Applications
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 174 (2 September 1999); doi: 10.1117/12.361259
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 185 (2 September 1999); doi: 10.1117/12.361260
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 193 (2 September 1999); doi: 10.1117/12.361261
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 199 (2 September 1999); doi: 10.1117/12.361262
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 207 (2 September 1999); doi: 10.1117/12.361263
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 217 (2 September 1999); doi: 10.1117/12.361264
MOEM Devices
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 230 (2 September 1999); doi: 10.1117/12.361265
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 238 (2 September 1999); doi: 10.1117/12.361266
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 245 (2 September 1999); doi: 10.1117/12.361267
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 253 (2 September 1999); doi: 10.1117/12.361268
MOEMS for Display Application
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 272 (2 September 1999); doi: 10.1117/12.361270
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 281 (2 September 1999); doi: 10.1117/12.361271
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 293 (2 September 1999); doi: 10.1117/12.361272
MOEMS Integration
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 304 (2 September 1999); doi: 10.1117/12.361273
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 310 (2 September 1999); doi: 10.1117/12.361274
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 319 (2 September 1999); doi: 10.1117/12.361275
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 328 (2 September 1999); doi: 10.1117/12.361277
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 337 (2 September 1999); doi: 10.1117/12.361278
Poster Session
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 350 (2 September 1999); doi: 10.1117/12.361279
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 358 (2 September 1999); doi: 10.1117/12.361280
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 365 (2 September 1999); doi: 10.1117/12.361281
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 375 (2 September 1999); doi: 10.1117/12.361282
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 384 (2 September 1999); doi: 10.1117/12.361283
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 392 (2 September 1999); doi: 10.1117/12.361284
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 398 (2 September 1999); doi: 10.1117/12.361285
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 407 (2 September 1999); doi: 10.1117/12.361287
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 416 (2 September 1999); doi: 10.1117/12.361288
MOEM Devices
Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, pg 261 (2 September 1999); doi: 10.1117/12.361289
Back to Top