2 September 1999 Advanced micromoulding of optical components
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Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361289
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
There is a growing need for micro-optical components in the field of tele- and datacom applications. Such components have to be very precise and should be available in reasonable numbers. Microtechnology provides manufacturing techniques that fulfill both requirements. Using micro electro discharge machining, laser micromachining, ultra precision milling and deep lithography with subsequent electroforming methods, complex tools for the replication of highly precise plastic parts have been manufactured. In many cases a combination of methods enumerated above gives a tool which shows both functionality and cost-efficiency. As examples we present the realization of integrated-optical components with passive fiber-waveguide coupling used as components in optical networks and as velocity sensors for two-phase flows, like liquids containing small gas bubbles or particles. In the first case multimode 4 X 4 star couplers have been manufactured in a pilot series that show excess loss values below 3 dB and a uniformity better than 3 dB at 830 nm. This performance becomes possible by using a compression molding process. By stamping the microstructured mold into a semifinished PMMA plate exact replication of the molds as well as very low surface roughness of the waveguide side walls could be observed. In the second case the waveguide channels of the flow sensors show dimensions of between 20 micrometer and 100 micrometer and an aspect ratio of about 20. These structures have been replicated by injection molding of PMMA using variotherm process treatment with a cycle time of about 2 - 3 min.
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Hans-Dieter Bauer, Hans-Dieter Bauer, Wolfgang Ehrfeld, Wolfgang Ehrfeld, Thomas Paatzsch, Thomas Paatzsch, Ingo Smaglinski, Ingo Smaglinski, Lutz Weber, Lutz Weber, } "Advanced micromoulding of optical components", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361289; https://doi.org/10.1117/12.361289

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