2 September 1999 Analogously working micromirror arrays
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Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361292
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
This paper deals with micromirror arrays for high frequency applications. The use of monocrystalline silicon as mechanical material results in a low hysteresis, good reproducibility and high reliability. General characteristics, advantages and limitations of large analogously working mirror arrays in comparison with single elements will be discussed with respect to the requirements of desired applications. Special aspects of the design of micromirror arrays, experimental results concerning the behavior of the electromechanical system and optical properties will be presented as well. It will be shown that cascaded elements allow beside higher quality factors or resonant band width concerning the dynamic behavior also higher quasistatic deflection angles at diminished electrode gaps and lower driving voltages.
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Kersten Kehr, Steffen Kurth, Jan Mehner, Christian Kaufmann, Ramon Hahn, Wolfram Doetzel, Thomas Gessner, "Analogously working micromirror arrays", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361292; https://doi.org/10.1117/12.361292
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