Design and FEM simulation: all-light-processing infrared image transducer

Liuqiang Zhang; Gen Qing Yang

doi:10.1117/12.361272

2 September 1999 Design and FEM simulation: all-light-processing infrared image transducer

Liuqiang Zhang, Gen Qing Yang

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361272
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

The novel thermal image system described in this paper is an all-light-processing infrared image transducer based on micromachining technology. This system incorporates the function of infrared image conversion and image intensification together on the base of a light-modulating thermal image device (LMTID), a monolithically fabricated chip using CMOS compatible surface micromachining techniques. This system has a series of potential advantages: high sensitivity and definition, low volume and power expenditure as well as short response time and room temperature operating ability. The design and modeling of the device are presented. Theoretical calculations on the sensitivity, minimum detectable power, and response time are carried out using a simple beam theory, and the design is optimized for the sake of high sensitivity and low minimum detectable power. FEM simulation using ANSYS 5.4 program basically demonstrates the theoretical calculations, as a result of which a sensitivity of 0.03 m/W and a response time of 6 ms are obtained.

Citation Download Citation

Liuqiang Zhang and Gen Qing Yang "Design and FEM simulation: all-light-processing infrared image transducer", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361272

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