Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench

Alexander Ksendzov; Richard D. Martin; Darius Modarress; Mory Gharib

doi:10.1117/12.361273

2 September 1999 Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench

Alexander Ksendzov, Richard D. Martin, Darius Modarress, Mory Gharib

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361273
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

We have built a miniature illuminator for Laser Doppler velocimeter on micromachined silicon optical bench utilizing a novel optical scheme. We used two intersecting coherent beams from the two opposing facets of semiconductor laser die to form a standing interference pattern needed for the particle detection and velocity measurement. Such devices are of interest to NASA for investigating wind patterns and dust loading on planets with atmosphere. They have been applied to problems where the liquid or gas flux must be characterized without disturbing the flow. In addition, the small probe volume makes possible local flow characterization and profiling. The device fabrication, and the results of the fringe characterization and velocity measurements are presented and discussed.

Citation Download Citation

Alexander Ksendzov, Richard D. Martin, Darius Modarress, and Mory Gharib "Miniature illuminator for laser Doppler velocimeter assembled on micromachined silicon optical bench", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361273

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