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2 September 1999 Miniature ultrasonic transducers with optical strain readout
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Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361266
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
In this paper we demonstrate the use of diffractive gratings to optically measure strain in miniature ultrasonic transducers. Aluminum diffraction gratings were fabricated on silicon-microfabricated ultrasonic horns and beams which were actuated by bonded piezoelectric PZT (Lead-Zirconate Titanate) plates. A He-Ne laser beam was diffracted from the grating and a knife-edge was used to measure small changes in the diffraction angle as a result of time varying grating space and width. The measured strain and displacement profiles agreed with the expected mode patterns for the silicon resonators.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chung-Hoon Lee and Amit Lal "Miniature ultrasonic transducers with optical strain readout", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361266
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