Optical characteristics of PZT thin film actuator-driven micro-optical scanning sensor with multilayer stacked device structure

Hiromi Totani; Masaaki Ikeda; Akira Akiba; Takahiro Masuda; Hiroshi Goto; Mikio Matsumoto

doi:10.1117/12.361262

2 September 1999 Optical characteristics of PZT thin film actuator-driven micro-optical scanning sensor with multilayer stacked device structure

Hiromi Totani, Masaaki Ikeda, Akira Akiba, Takahiro Masuda, Hiroshi Goto, Mikio Matsumoto

Author Affiliations +

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361262
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

We developed a micro optical scanning sensor with the dimension of 2.0 mm X 4.0 mm X 3.0 mm for a micro inspection robot. In this sensor, the functional elements such as a laser diode (light source), photo diodes, pin-holes, a beam splitter, a ball lens, and a PZT thin film actuator driven micro optical scanner are integrated on separate substrates each consisting a functional modules and the substrates are stacked. Performance of the optical sensor depends on its optical characteristics. This sensor has spot size of output beam is 256 micrometer X 580 micrometer at 60 mm from the sensor, output power is 0.5 mW, optical scanning angles are plus or minus 10 deg. two-dimensionally, and detecting sensitivity of photo diodes are 0.3 A/W. The sensor is capable of distance measurement between the sensor and an object at 50 mm plus or minus 10 mm and the object shape recognition two-dimensionally based on the optical scanning method. By using these functions, the sensor can measure dimensions of the object and measuring resolution is less than 0.5 mm.

Citation Download Citation

Hiromi Totani, Masaaki Ikeda, Akira Akiba, Takahiro Masuda, Hiroshi Goto, and Mikio Matsumoto "Optical characteristics of PZT thin film actuator-driven micro-optical scanning sensor with multilayer stacked device structure", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361262

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