2 September 1999 Through-wafer interrogation of microstructure motion for MEMS feedback control
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Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361271
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
Closed-loop MEMS control enables mechanical microsystems to adapt to the demands of the environment which they are actuating opening a new window of opportunity for future MEMS applications. Planar diffractive optical microsystems have the potential to enable the integrated optical interrogation of MEMS microstructure position fully decoupled from the means of mechanical actuation which is central to realization of feedback control. This paper presents the results of initial research evaluating through-wafer optical microsystems for MEMS integrated optical monitoring. Positional monitoring results obtained from a 1.3 micrometer wavelength through- wafer free-space optical probe of a lateral comb resonator fabricated using the Multi-User MEMS Process Service (MUMPS) are presented. Given the availability of positional information via probe signal feedback, a simulation of the application of nonlinear sliding control is presented illustrating position control of the lateral comb resonator structure.
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Jeremy M. Dawson, Jeremy M. Dawson, Jingdong Chen, Jingdong Chen, Kolin S. Brown, Kolin S. Brown, Parviz F. Famouri, Parviz F. Famouri, Lawrence Anthony Hornak, Lawrence Anthony Hornak, } "Through-wafer interrogation of microstructure motion for MEMS feedback control", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); doi: 10.1117/12.361271; https://doi.org/10.1117/12.361271
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