31 August 1999 Influence of nonuniformity on the performance of PtSi IRCCD with refractive microlens array
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Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360524
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
At present, large-area staring infrared (IR) focal plane arrays (FPAs) with CCD multiplexer readout arrays have been used in many fields. Because the filling factor of the detector is poor (generally not more than 50%), which reduces the opto-electronic sensitivity of image sensor, refractive microlens array has been used to increase the filling factor of the large-area IR focal plane array and then improve the opto-electronic sensitivity of the imaging device. Taking into account the situation as above, the characteristics of the nonuniformity of the opto-electronic signal of IR focal plane array with refractive microlens array should be considered. The opto-electronic signal from an IR focal plane array with a microlens array as the function of the incident radiation power falling on it differs from pixel to pixel. This nonuniformity will degrade image IRCCD device. In this paper, we deal with the nonuniformity of the large-area PtSi IRCCD with refractive microlens array, calculate the change of nonuniformity of the imaging device with micro-optical component, and analyze the influence of refractive microlens array on the nonuniformity of PtSi IRCCD device. The theoretical model is developed to determine the maximum opto-electronic sensitivity of the detectors with microlens array.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qingle Tang, "Influence of nonuniformity on the performance of PtSi IRCCD with refractive microlens array", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360524; https://doi.org/10.1117/12.360524
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