31 August 1999 Mid-infrared refractive optical elements made in a polymer matrix
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Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360530
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
Mid-infrared optical microelements, like lenses or array of them, can be used to couple light or to form images. We present simple methods to fabricate mid-infrared microlenses and other optical elements by means of irradiation of a polymer substrate with CO2 laser or by the melting method. Application of these methods can lead to a mass production, low cost mid-infrared elements. It is analyzed the influence of some fabrication process variables in the final parameters of the elements. The quality of the microlenses was characterized by direct measurement of their surface profile through mechanical (surface analyzer) and optical (interference) methods. Capability of microelements to form infrared images is shown.
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Manuel Ornelas-Rodriguez, Manuel Ornelas-Rodriguez, Sergio Calixto-Carrera, Sergio Calixto-Carrera, } "Mid-infrared refractive optical elements made in a polymer matrix", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360530; https://doi.org/10.1117/12.360530
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