31 August 1999 Noise reduction in the recording of holographic masks in photoresist
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Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360529
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
The lithography of gratings or structures using photoresist holographic masks is very critical, in particular when high selectivity etching processes were employed. In this paper we study the effect of the mask profile and of the phase perturbations during the holographic exposure in the noise of the photoresist masks. It is shown that the use of appropriate conditions of development and exposure may reduce significantly this noise allowing the recording of high aspect ratio structures and the use of selective deposition techniques.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lucila H. D. Cescato, Lucila H. D. Cescato, Leandro L. Soares, Leandro L. Soares, Elso Luiz Rigon, Elso Luiz Rigon, Marco A.R. Alves, Marco A.R. Alves, Edmundo S. Braga, Edmundo S. Braga, } "Noise reduction in the recording of holographic masks in photoresist", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360529; https://doi.org/10.1117/12.360529
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