31 August 1999 Quasi-continuous mask-coding method for fabricating diffractive optical elements
Author Affiliations +
Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360515
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Based on the analysis of the effect of fabrication errors on diffraction efficiency of a diffractive optical element and image quality of a binary optical lens (BOL), a novel quasi- continuous mask-coding (QCMC) method is presented in this paper. This coding method puts forward a series of new mask patterns, making it possible to fabricate quasi-continuous micro profile by using the same number of masks as employed in the traditional `binary' fabrication technology. The QCMC technique breaks through the current convention for coding m masks to get the micro profile with 2m steps in one zone. This paper presents the theory of the QCMC method and provides examples of practical mask patterns. by using QCMC, BOLs with enhanced diffraction efficiency can be fabricated by traditional multilayer micro fabrication method or by laser writing technology without any additional equipment or processing procedure. Employing this method will enhance the diffraction efficiency, the optical performance, and in particular the image quality of a hybrid optical imaging system.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Liping Zhao, Liping Zhao, Yee Loy Lam, Yee Loy Lam, Yan Zhou, Yan Zhou, } "Quasi-continuous mask-coding method for fabricating diffractive optical elements", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360515; https://doi.org/10.1117/12.360515


Off-axis illumination of lithography tool
Proceedings of SPIE (December 30 2013)
Fourier ptychography for lithography high NA systems
Proceedings of SPIE (May 27 2018)

Back to Top