31 August 1999 Refractive microlens array integration with linear high-power semiconductor laser array
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Proceedings Volume 3879, Micromachine Technology for Diffractive and Holographic Optics; (1999) https://doi.org/10.1117/12.360522
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
It is a relatively simple and effective method to incorporate a monolithic refractive microlens array with a linear high power semiconductor laser array. The refractive microlens array of a corresponding periodicity behaves as optical collimating lens and is used to collimate the highly divergent beam out of the semiconductor laser array. Just a few papers were reported for the use of diffractive and refractive microlens to improve the performance of diode lasers. This paper describes the design and analysis of the refractive cylinder microlens array, and the integration of a linear semiconductor laser array and a refractive cylinder microlens array with different sag and diameter. The theoretical results and computer simulation show that the refractive cylinder microlens array can be effectively used to collimate the light beam out of semiconductor lasers from several tens of degrees to several tens of mrad. The major challenge is the accurate profile control of refractive cylinder microlens, good optical coupling between semiconductor lasers and refractive microlens array, and the critical alignment of lasers and microlens array.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Qingle Tang, Qingle Tang, } "Refractive microlens array integration with linear high-power semiconductor laser array", Proc. SPIE 3879, Micromachine Technology for Diffractive and Holographic Optics, (31 August 1999); doi: 10.1117/12.360522; https://doi.org/10.1117/12.360522
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