MEMS reliability for space applications by elimination of potential failure modes through testing and analysis

Kin F. Man

doi:10.1117/12.359361

18 August 1999 MEMS reliability for space applications by elimination of potential failure modes through testing and analysis

Kin F. Man

Author Affiliations +

Proceedings Volume 3880, MEMS Reliability for Critical and Space Applications; (1999) https://doi.org/10.1117/12.359361
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

As the design of Micro-Electro-Mechanical Systems (MEMS) devices matures and their application extends to critical areas, the issues of reliability and long-term survivability become increasingly important. This paper reviews some general approaches to addressing the reliability and qualification of MEMS devices for space applications. The failure modes associated with different types of MEMS devices that are likely to occur, not only under normal terrestrial operations, but also those that are encountered in the harsh environments of space, will be identified.

Citation Download Citation

Kin F. Man "MEMS reliability for space applications by elimination of potential failure modes through testing and analysis", Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); https://doi.org/10.1117/12.359361

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