18 August 1999 MEMS reliability for space applications by elimination of potential failure modes through testing and analysis
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Proceedings Volume 3880, MEMS Reliability for Critical and Space Applications; (1999) https://doi.org/10.1117/12.359361
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States
Abstract
As the design of Micro-Electro-Mechanical Systems (MEMS) devices matures and their application extends to critical areas, the issues of reliability and long-term survivability become increasingly important. This paper reviews some general approaches to addressing the reliability and qualification of MEMS devices for space applications. The failure modes associated with different types of MEMS devices that are likely to occur, not only under normal terrestrial operations, but also those that are encountered in the harsh environments of space, will be identified.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Kin F. Man, Kin F. Man, "MEMS reliability for space applications by elimination of potential failure modes through testing and analysis", Proc. SPIE 3880, MEMS Reliability for Critical and Space Applications, (18 August 1999); doi: 10.1117/12.359361; https://doi.org/10.1117/12.359361
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