Influence of laser annealing conditions on the performance of 0.6-um polysilicon TFTs

Mitsuru Chida; Katsuyuki Suga; Yasuyoshi Mishima; Nobuo Sasaki

doi:10.1117/12.360547

1 September 1999 Influence of laser annealing conditions on the performance of 0.6-μm polysilicon TFTs

Mitsuru Chida, Katsuyuki Suga, Yasuyoshi Mishima, Nobuo Sasaki

Proceedings Volume 3881, Microelectronic Device Technology III; (1999) https://doi.org/10.1117/12.360547
Event: Microelectronic Manufacturing '99, 1999, Santa Clara, CA, United States

Abstract

We have investigated the influence of ambient and laser energy density on the characteristics of excimer laser crystallized poly-Si films and TFT performance. It was found that poly-Si films crystallized in air showed higher peak position of Raman spectra and larger grain size than those crystallized in vacuum. Excimer laser annealing (ELA) in vacuum made the surface roughness of poly-Si films smaller than that in air. These results show that oxygen plays an important role in grain growth. The investigation of TFT performance with gate length of 0.6 micrometers that is comparable to the grain size of ELA poly-Si films showed that intragrain defects as well as grain size influence the TFT performance.

Citation Download Citation

Mitsuru Chida, Katsuyuki Suga, Yasuyoshi Mishima, and Nobuo Sasaki "Influence of laser annealing conditions on the performance of 0.6-μm polysilicon TFTs", Proc. SPIE 3881, Microelectronic Device Technology III, (1 September 1999); https://doi.org/10.1117/12.360547

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available