Integration of the APC framework with AMD's Fab25 factory system

Scott Bushman; William Jarrett Campbell; Michael L. Miller

doi:10.1117/12.361323

3 September 1999 Integration of the APC framework with AMD's Fab25 factory system

Scott Bushman, William Jarrett Campbell, Michael L. Miller

Proceedings Volume 3882, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V; (1999) https://doi.org/10.1117/12.361323
Event: Microelectronic Manufacturing '99, 1999, Santa Clara, CA, United States

Abstract

This paper discusses the integration and development of advanced process control technologies with AMD's Fab25 factory systems using the Advance Process Control Framework. The Framework is an open software architecture that allows the integration of existing factory systems, such as the manufacturing execution systems, configurable equipment interfaces, recipe management systems, metrology tools, process tools, and add-on sensors, into a system which provides advanced process control specific functionality. The Advanced Process Control Framework project was formulated to enable effective integration of Advanced Process Control applications into a semiconductor facility to improve manufacturing productivity and product yields. The main communication link between the factory system and the Framework is the Configurable Equipment Interface. It interfaces through a specialized component in the framework, the Machine Interface, which converts the factory system communication protocol, ISIS, to the Framework protocol, CORBA. The Framework is a distributed architecture that uses CORBA as a communication protocol between specialized components. A generalized example of how the Framework is integrated into the semiconductor facility is provided, as well as a description of the overall architecture used for process control strategy development. The main development language, Tcl/Tk, provides for increased development and deployment over traditional coding methods.

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Scott Bushman, William Jarrett Campbell, and Michael L. Miller "Integration of the APC framework with AMD's Fab25 factory system", Proc. SPIE 3882, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V, (3 September 1999); https://doi.org/10.1117/12.361323

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KEYWORDS

Process control

Telecommunications

Metrology

Manufacturing

Semiconductors

Interfaces

Control systems

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