Fatal defect detection from visual abnormalities of logic LSI using IDDQ

Masaru Sanada; Hiromu Fujioka

doi:10.1117/12.361355

27 August 1999 Fatal defect detection from visual abnormalities of logic LSI using IDDQ

Masaru Sanada, Hiromu Fujioka

Proceedings Volume 3884, In-Line Methods and Monitors for Process and Yield Improvement; (1999) https://doi.org/10.1117/12.361355
Event: Microelectronic Manufacturing '99, 1999, Santa Clara, CA, United States

Abstract

Abnormal IDDQ (Quiescent VDD supply current) indicates the existence of physical damage in a circuit. Using this phenomenon, a CAD-based fault diagnosis technology has been developed to analyze the manufacturing yield of logic LSI. This method to detect the fatal defect fragments in several abnormalities identified with wafer inspection apparatus includes a way to separate various leakage faults, and to define the diagnosis area encircling the abnormal portions. The proposed technique progressively narrows the faulty area by using logic simulation to extract the logic states of the definition area, and by locating test vector related to abnormal IDDQ, following which fundamental diagnosis way employs the comparative operation of each circuit element to determine whether the same logic state with abnormal IDDQ exists in normal logic state or not.

Citation Download Citation

Masaru Sanada and Hiromu Fujioka "Fatal defect detection from visual abnormalities of logic LSI using IDDQ", Proc. SPIE 3884, In-Line Methods and Monitors for Process and Yield Improvement, (27 August 1999); https://doi.org/10.1117/12.361355

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