1 February 2000 Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition
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Proceedings Volume 3885, High-Power Laser Ablation II; (2000); doi: 10.1117/12.376965
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan
Abstract
Time-of-flight mass spectrometry has been used to probe neutral and positive ionic species produced by laser ablation of a graphite target at 266, 355, 532, and 1064 nm. The arrival time distributions of major carbon species (C3, C+, and C3+) at a deposition substrate, 45 mm from a target, were fitted with a thermal Maxwell-Boltzmann (MB) distribution or a shifted MB distribution with a narrower width. The characteristics of laser ablation with shorter-wavelength laser light are the formation of atomic carbon species with high kinetic energies and the promotion of their ionization. We discuss the generation process of C+ and the formation of a tetrahedral amorphous carbon film with a high fraction of sp3 bonded carbon atoms.
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Fumio Kokai, Kazuhiro Yamamoto, Yoshinori Koga, "Time-of-flight mass spectrometric studies on laser ablation dynamics of graphite: correlation to diamondlike carbon film deposition", Proc. SPIE 3885, High-Power Laser Ablation II, (1 February 2000); doi: 10.1117/12.376965; https://doi.org/10.1117/12.376965
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KEYWORDS
Carbon

Laser ablation

Ions

Spectroscopy

Ionization

Chemical species

Mass spectrometry

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