7 February 2000 Development of adaptive mirror for CO2 laser
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Proceedings Volume 3888, High-Power Lasers in Manufacturing; (2000) https://doi.org/10.1117/12.377060
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan
Material processing using CO2 laser is one of the most highly industrialized laser technologies. Recently, there have been growing demands to improve the processing quality by flexibly controlling the beam properties. Development of the adaptive mirror with variable curvature function, which is one of the vital optics to realization of these demands, has been extensively pursued. We developed the AM. It maintains the same accuracy of surface figure (PV value: 1 micrometer or below) as the conventional mirrors even when the curvature is changed, and is capable of high speed curvature control (maximum frequency: 1 kHz) aiming at application to beam sawing. Further, we applied the AM to laser cutting of mild steel as an example of its practical use, and studied smoothing of the cut surface by beam sawing.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takeshi Okada, Keiji Ebata, Manabu Shiozaki, Tatuya Kyotani, Akihiko Tsuboi, M. Sawada, H. Fukushima, "Development of adaptive mirror for CO2 laser", Proc. SPIE 3888, High-Power Lasers in Manufacturing, (7 February 2000); doi: 10.1117/12.377060; https://doi.org/10.1117/12.377060

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