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3 April 2000 Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser
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Proceedings Volume 3889, Advanced High-Power Lasers; (2000)
Event: Advanced High-Power Lasers and Applications, 1999, Osaka, Japan
The optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser has been investigated. Nearly diffraction limited beams can be obtained in short burst mode up to 1 kHz. Long burst mode operation is currently limited by the quality of the optics. The beam pointing variation is reduced to half the divergence angle and is found to be independent of the repetition rate of the laser system.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ramon M. Hofstra, John C.M. Timmermans, and Hubert J. G. Van Heel "Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser", Proc. SPIE 3889, Advanced High-Power Lasers, (3 April 2000);


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