4 November 1999 Dissolution of indium arsenide in HNO3-HBr-H2O and Br2-HBr solutions
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Abstract
The InAs dissolution in HNO3-HBr-H2O and Br2-HBr solutions is investigated. The surface of equal etching rates is constructed and the process limiting stages of dissolution depending on a size of a ratio in such solutions are determined. The kinetics of InAs dissolution in Br2- HBr solutions is investigated. The solution region which can be used for chemicodynamic polishing of InAs is determined.
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Z. F. Tomashik, S. G. Danylenko, V. N. Tomashik, "Dissolution of indium arsenide in HNO3-HBr-H2O and Br2-HBr solutions", Proc. SPIE 3890, Fourth International Conference on Material Science and Material Properties for Infrared Optoelectronics, (4 November 1999); doi: 10.1117/12.368403; https://doi.org/10.1117/12.368403
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