PROCEEDINGS VOLUME 3891
ASIA PACIFIC SYMPOSIUM ON MICROELECTRONICS AND MEMS | 27-29 OCTOBER 1999
Electronics and Structures for MEMS
ASIA PACIFIC SYMPOSIUM ON MICROELECTRONICS AND MEMS
27-29 October 1999
Gold Coast, Australia
Processors and Sensors
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 82 (29 September 1999); doi: 10.1117/12.364431
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 91 (29 September 1999); doi: 10.1117/12.364441
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 99 (29 September 1999); doi: 10.1117/12.364450
Accelerometers and Gyros
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 112 (29 September 1999); doi: 10.1117/12.364462
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 121 (29 September 1999); doi: 10.1117/12.364473
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 126 (29 September 1999); doi: 10.1117/12.364474
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 134 (29 September 1999); doi: 10.1117/12.364475
Flowmeters and Flow Control
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 146 (29 September 1999); doi: 10.1117/12.364433
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 157 (29 September 1999); doi: 10.1117/12.364434
Analysis Structures; Micromotors
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 168 (29 September 1999); doi: 10.1117/12.364435
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 178 (29 September 1999); doi: 10.1117/12.364436
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 184 (29 September 1999); doi: 10.1117/12.364437
Micro-Bearings
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 192 (29 September 1999); doi: 10.1117/12.364438
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 199 (29 September 1999); doi: 10.1117/12.364439
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 210 (29 September 1999); doi: 10.1117/12.364440
Imaging and Optics
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 218 (29 September 1999); doi: 10.1117/12.364443
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 226 (29 September 1999); doi: 10.1117/12.364444
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 238 (29 September 1999); doi: 10.1117/12.364445
Optics and Lasers
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 248 (29 September 1999); doi: 10.1117/12.364446
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 257 (29 September 1999); doi: 10.1117/12.364447
RF MEMS
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 266 (29 September 1999); doi: 10.1117/12.364448
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 276 (29 September 1999); doi: 10.1117/12.364451
Poster Session
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 286 (29 September 1999); doi: 10.1117/12.364453
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 296 (29 September 1999); doi: 10.1117/12.364454
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 304 (29 September 1999); doi: 10.1117/12.364455
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 312 (29 September 1999); doi: 10.1117/12.364456
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 322 (29 September 1999); doi: 10.1117/12.364457
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 328 (29 September 1999); doi: 10.1117/12.364458
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 336 (29 September 1999); doi: 10.1117/12.364459
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 344 (29 September 1999); doi: 10.1117/12.364460
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 352 (29 September 1999); doi: 10.1117/12.364463
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 359 (29 September 1999); doi: 10.1117/12.364465
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 369 (29 September 1999); doi: 10.1117/12.364466
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 376 (29 September 1999); doi: 10.1117/12.364467
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 385 (29 September 1999); doi: 10.1117/12.364468
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 395 (29 September 1999); doi: 10.1117/12.364469
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 403 (29 September 1999); doi: 10.1117/12.364470
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 410 (29 September 1999); doi: 10.1117/12.364471
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 416 (29 September 1999); doi: 10.1117/12.364472
Invited Paper Session
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 22 (29 September 1999); doi: 10.1117/12.364432
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 26 (29 September 1999); doi: 10.1117/12.364442
Plenary Session
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 2 (29 September 1999); doi: 10.1117/12.364449
Invited Paper Session
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 39 (29 September 1999); doi: 10.1117/12.364452
Plenary Session
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 10 (29 September 1999); doi: 10.1117/12.364461
Invited Paper Session
Proc. SPIE 3891, Electronics and Structures for MEMS, pg 49 (29 September 1999); doi: 10.1117/12.364464
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