29 September 1999 Micro tactile sensor with capacitive-inductive function for discrimination of object property
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Abstract
We have developed multi-sensing artificial touch devices for the recognition of object properties and its surface situation. In this paper we present the fabrication of a thin-plate micro tactile sensor with two sensing functions of capacitance and inductance, and introduce the results of comparison of characteristics among various types of micro sensor distinctly depend on each size of the sensors, them material of electrodes, and the depth of insulating layer in the sensor. Furthermore, by preparing the shielding layer in the sensor in the way of the fabrication process, it was found that the problem which occurred in miniaturizing the sensor would be solved.
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Katsunori Shida, Katsunori Shida, Ryo Sato, Ryo Sato, Katsuya Higa, Katsuya Higa, Tanemasa Asano, Tanemasa Asano, } "Micro tactile sensor with capacitive-inductive function for discrimination of object property", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364456; https://doi.org/10.1117/12.364456
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