29 September 1999 Micromagnetic bearing for friction minimization in micromachines
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A micro magnetic bearing actuator has been designed using elector-magnets. In this design, the rotor position is actively controlled in the radial direction and passively supported in the axial directions. A micro position sensor along with a Proportional Derivative control system constitutes the feed-back network, which ensures the rotor actively suspended in radial directions. The circular stator has four control coils which are sandwiched between two stator end plates. The diameter of the stator and rotor are 2.1 and 2.6 mm respectively, while the thickness is fixed at 250(mu) . The air gap between the stator and rotor has been fixed at 10(mu) . Stator and rotor plates were fabricated using permalloy electroplating, while the control coils of the stator were hand wound using conventional wire winding techniques. An enamel coated copper wire of 20(mu) diameter was used for this purpose. These parts are assembled using normal micro assembly techniques. The details of the fabrication and assembly techniques employed for the micro bearing are presented along with the preliminary test results.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Muralihar K. Ghantasala, Dinesh K. Sood, and Ronald B. Zmood "Micromagnetic bearing for friction minimization in micromachines", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364440; https://doi.org/10.1117/12.364440

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