29 September 1999 Novel micropump actuated by thin film shape memory alloy
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A novel micropump actuated by thin film shape memory alloy has been designed, fabricated and tested. It is one of the membrane reciprocating micropumps which is driven by shape recoverable force of NiTi thin film and biasing force of Si membrane. The micropump is composed of a deformable chamber and two Si flap check valves. The structure of pump is simple. The pump was manufactured by Si surface and bulk micromachining technologies, Au-Si eutectic and epoxy bonding. The outer dimension of the micropump is 6*6*1.5 mm/mm/mm. The NiTi/Si composite actuator has an area of 3*3mm/mm with a thickness of 20micrometers Testing result show that the pump has extremely good performance, such as high pumping yield, low power consumption high working frequency. All these advantages are attributed to the patterning of NiTi thin film used as self-heating element and optimizing design of NiTi/Si actuated structure.
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Dong Xu, Dong Xu, Bingchu Cai, Bingchu Cai, Guifu Ding, Guifu Ding, Yong Zhou, Yong Zhou, Aibin Yu, Aibin Yu, Li Wang, Li Wang, Xiaolin Zhao, Xiaolin Zhao, } "Novel micropump actuated by thin film shape memory alloy", Proc. SPIE 3891, Electronics and Structures for MEMS, (29 September 1999); doi: 10.1117/12.364466; https://doi.org/10.1117/12.364466

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