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1 October 1999 Drop-by-drop deposition of ceramic slurry for fabrication of PZT microstructures
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Abstract
Most of the techniques available for ceramic microprocessing, e.g. tape casting, sputtering and sol-gel processing suffer from lack of geometrical flexibility although they often allow for good thickness control. With the interest for ceramic material in MST, especially the piezoelectric lead zirconate titanate, often involving more complex geometries, development of complementary technologies seems motivated.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lena Klintberg, Greger Thornell, and Stefan A. I. Johansson "Drop-by-drop deposition of ceramic slurry for fabrication of PZT microstructures", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364479
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