1 October 1999 Fabrication of thin film metallic glass and its application to microactuators
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Abstract
Metallic glasses are kinds of amorphous alloys. They are free from defects resulting from crystalline structures. Metallic glasses soften in a certain temperature range called the supercooled liquid region, which makes metallic glasses easily be formed into a 3D shape. This paper first describes a fabrication method for a thin film metallic glass (TFMG) using RF magnetron sputtering. Secondly A micro beam of TFMG is introduced. Although the fabricated micro beams bent due to the internal stress caused by stress was related by annealing the beams in the supercooled liquid region, and straight beams were fabricated. Secondly, curved micro beams of TFMG were micro formed by heating the straight beams again into the supercooled liquid state. Finally, a new type electrostatic microactuator of a conical spring shape was made of TFMG. CSLA was capable of stepwise motion vertical to the substrate. The 10 micrometers step height and 30 micrometers total height were realized.
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Seiichi Hata, Kaiji Sato, Akira Shimokohbe, "Fabrication of thin film metallic glass and its application to microactuators", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); doi: 10.1117/12.364504; https://doi.org/10.1117/12.364504
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