Inertial sensing paradigm using an accelerometer array: XL-array

Seo Kyu Kim; KukJin Chun

doi:10.1117/12.364484

1 October 1999 Inertial sensing paradigm using an accelerometer array: XL-array

Seo Kyu Kim, KukJin Chun

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364484
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

An accelerometer array that is a new concept for inertial sensing paradigm is presented. A surface micromachining technology with 6 micrometers -thick polycrystalline silicon was used to fabricate the array and dichlorodimethylsilane grafting as a new anti-stiction method was used to perfectly release 36 accelerometer cells. Test result show the dynamic range of +/- 30G with 1 percent non-linearity and 2.5 mG noise equivalent level. The XL-array was composed of 36 sensing capacitors of the accelerometer cells that are connected in parallel. So the total capacitance in the XL- array was the capacitance of unit cell multiplied by the number of the accelerometer cell.Lager capacitance change is required to obtain a high sensitivity and SNR. This multiple cell structure could provide redundancy for low-yield manufacturing. The cell structures can be easily scaled for spring stiffness and mass to increase the resonant frequency and operating bandwidth. This array-typed structure also gives less sensitivity to residual stress and stress gradient than larger single mass structure. Higher performance can be achieved by making of large array.

Citation Download Citation

Seo Kyu Kim and KukJin Chun "Inertial sensing paradigm using an accelerometer array: XL-array", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364484

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