Monitoring photoresist glass transition temperature versus processing parameters via NMR broad band spectroscopy

Dan V. Nicolau; Cristina Bercu; Simion Coca; Takahisa Taguchi

doi:10.1117/12.364492

1 October 1999 Monitoring photoresist glass transition temperature versus processing parameters via NMR broad band spectroscopy

Dan V. Nicolau, Cristina Bercu, Simion Coca, Takahisa Taguchi

Author Affiliations +

Proceedings Volume 3892, Device and Process Technologies for MEMS and Microelectronics; (1999) https://doi.org/10.1117/12.364492
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

We propose a method for the monitoring of the glass transition temperature of the resist used in semiconductor lithography based on the broad-band Nuclear Magnetic Resonance technique. The method is capable to trace the evolution of the mobility of several major chemical species present in a resist system versus processing parameters, e.g. exposure energy and bake temperature. The most important components, namely the lower molecular weight photoactive compound and the higher molecular weight base resin, were characterized, in accordance with their signals, as mobile and the rigid component, respectively. The method has the potential for being used for process optimization and for on-line monitoring.

Citation Download Citation

Dan V. Nicolau, Cristina Bercu, Simion Coca, and Takahisa Taguchi "Monitoring photoresist glass transition temperature versus processing parameters via NMR broad band spectroscopy", Proc. SPIE 3892, Device and Process Technologies for MEMS and Microelectronics, (1 October 1999); https://doi.org/10.1117/12.364492

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available