8 October 1999 Low-cost metal micropump for drug delivery
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The design, fabrication and characterization of a micro-pump for drug delivery are presented in this paper. A low cost metallic micro-pump capable of handling low fluid volumes and having the potential for application in drug delivery is described. The pump is of the reciprocating displacement type and is driven by a piezoelectric diaphragm actuator. The main parts of the pump are made of stainless steel and can be readily fabricated using precision casting technology. The check valves are made form a polyamide membrane using photolithography. Equations presented in this report are useful for predicting the behavior of the actuation unit as well as the valve unit. Based on the analysis, a prototype of the micro-pump is designed and fabricated, from which a maximum pump rate of 255ul/min for water was achieved.
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Francis E.H. Tay, G. L. Xu, Wen On Choong, Hong Xue, "Low-cost metal micropump for drug delivery", Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); doi: 10.1117/12.368430; https://doi.org/10.1117/12.368430

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