8 October 1999 Modeling and simulation of a three-axis acceleration sensing system with a mixed signal simulator
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A 3 axis acceleration sensing system has been developed using force balance techniques based around 3 silicon capacitive accelerometers, a custom chip providing signal detection and control actuation and a DSP to implement the control algorithm. The accelerometers have a dual capacitor structure with a cantilevered central plate. The chip features a stray-insensitive switched capacitor integrator which uses synchronous detection to remove noise effects enabling the measurement of very small capacitance changes. On-chip digitization is provided by a sigma-delta converter. A DSP is used to implement a PID control algorithm providing force balance back to the accelerometers. The system has been modeled and simulated using combined mechanical and electrical models and the SABER mixed signal simulator. Good agreement has been obtained between simulated and measured frequency response for the capacitance accelerometers used. Simulations have identified the stable region of operation of the force balance system and enabled selection of the control coefficients. Both simulated and measured results are presented for the 3 axis system.
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David C. Greager, David C. Greager, Barry K. Marlow, Barry K. Marlow, "Modeling and simulation of a three-axis acceleration sensing system with a mixed signal simulator", Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); doi: 10.1117/12.368466; https://doi.org/10.1117/12.368466

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