8 October 1999 Programmable MEMS capacitor arrays
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Abstract
We describe a programmable capacitor technology under development at NCSU and its potential application in building programmable interconnect devices useful for system level connectivity functions, phased array beam steering, and RF switching. Crossbars are made from arrays of electrostatically controlled bistable MEMS-based capacitors. These new devices allow faster signaling and consume less power than BiCMOS crossbars. They also allow critical RF components to be shrinked in size substantially. We describe the essential elements of these arrays and present results obtained so far.
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Bruce E. Duewer, John M. Wilson, David A. Winick, Paul D. Franzon, "Programmable MEMS capacitor arrays", Proc. SPIE 3893, Design, Characterization, and Packaging for MEMS and Microelectronics, (8 October 1999); doi: 10.1117/12.368433; https://doi.org/10.1117/12.368433
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