MEMS by definition is interdisciplinary and a software that facilitates collaboration will be useful in both research and teaching. In this paper, a software, called CyberCAD that enables collaborative design via the Internet is described. The software is Java-based and is therefore platform independent. This project is ongoing and the completed portion includes the mathematical engine used for designing and rendering. In this paper, the object-oriented features of the software under construction are described. Although, the software is not ready for MEMS applications yet, the attributes that the software possesses will enable it to facilitate the development in the future.