Teaching sensor technology and MEMS processing using an in-house educational MPW process

Thorbjoern Ebefors; Edvard Kaelvesten

doi:10.1117/12.364513

29 September 1999 Teaching sensor technology and MEMS processing using an in-house educational MPW process

Thorbjoern Ebefors, Edvard Kaelvesten

Proceedings Volume 3894, Education in Microelectronics and MEMS; (1999) https://doi.org/10.1117/12.364513
Event: Asia Pacific Symposium on Microelectronics and MEMS, 1999, Gold Coast, Australia

Abstract

This paper presents a new innovative way of teaching modern sensor technology and practical MEMS-processing by using an in-house Multi Project Wafer (MPW) process especially developed for education purposes. This process has been used as the base for a project course called Sensor Technology, which includes a substantial laboratory component. In this project, the student actively follows the complete sensor development process from design and fabrication to the evaluation of modern MEMS sensors. The design and CAD work for five different sensor types (each having several different versions) has completed prior to the course but the students are introduced to the tools used for the design and simulation of microstructures. The students themselves perform most of the fabrication steps in the cleanroom and all evaluation of the fabricated sensors. Our new in-house MPW-process allows the students to fabricate five different piezoresistive sensor types for measuring flow (both mechanical and thermal transducers), acceleration (both 1- and 3-axis), pressure and angular velocity using one mask set consisting of only four masks. Each sensor type then is produced in many different versions (size and geometry) giving the students flexibility to choose sensors for specific applications during the sensor evaluation. Successful evaluations of pressure, flow and acceleration sensors fabricated by the students have been carried out. The sensor evaluation part also gives the student experience in practical electrical measurements on real devices. Both the course concept and the unique educational MPW-process will be described in this paper.

Citation Download Citation

Thorbjoern Ebefors and Edvard Kaelvesten "Teaching sensor technology and MEMS processing using an in-house educational MPW process", Proc. SPIE 3894, Education in Microelectronics and MEMS, (29 September 1999); https://doi.org/10.1117/12.364513

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KEYWORDS

Sensors

Microelectromechanical systems

Sensor technology

Semiconducting wafers

Resistors

Silicon

Etching

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