11 November 1999 Comparison of grating structures in optical fibers and integrated optics for MEMS applications
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Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369331
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
Abstract
With the emergence of new trends in optical communication and sensing syste, the importance and need for novel concepts such as diffractive gratings that can be implemented on a microscale has become a thrust area of research. In this paper, we compare various grating structures and their suitability for MEMS applications. The design approach, analysis and integration into optical systems are discussed in the context of both fiber and planar waveguide technology. Also, the differences and similarities among these methodologies using silicon micromachining are brought out. Parameters of interest, such as efficiency of micro-grating structures and ambient effects that influence the performance of the devices/systems are also discussed.
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Seriampalayam R. Natarajan, Vadakke Matham Murukeshan, Anand Krishna Asundi, "Comparison of grating structures in optical fibers and integrated optics for MEMS applications", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369331; https://doi.org/10.1117/12.369331
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