11 November 1999 Intensity-based fiber optic pressure sensor with an Au/NiCr/Si3 N4/SiO2/Si3N4 diaphragm
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Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369355
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
Abstract
Intensity based fiber optic pressure sensor has been fabricated using micromachining technology. The sensor consists of a multimode fiber bundle and a 100nm-Au/30nm- NiCr/150nm-Si3N4/300nm-SiO2/150nm- Si3N4 diaphragms supported by a micromachined frame-shape silicon substrate. The distance between the fiber bundle and the diaphragm of the pressure sensor is 900 micrometers . Three fiber optic pressure sensor having different size diaphragms were fabricated and used in experiments. The pressure sensitivities were 20.69 nW/kPa, 26.70 nW/kPa, and 39.33 nW/kPa for the pressure sensor with diaphragms of 3 X 3 mm2 area, 4 X 4 mm2 area, and 5 X 5 mm2 area.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jaehee Park, Jaehee Park, Myung Gyoo Kim, Myung Gyoo Kim, Yohee Kim, Yohee Kim, Kwangsoo Kim, Kwangsoo Kim, Ilmin Kim, Ilmin Kim, } "Intensity-based fiber optic pressure sensor with an Au/NiCr/Si3 N4/SiO2/Si3N4 diaphragm", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369355; https://doi.org/10.1117/12.369355
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