11 November 1999 Micro-electro-mechanical fiber optical switches
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Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369330
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
This paper reports the design, fabrication, and testing of a Micro-opto-mechanical grating/mirror switch driven by electrostatic actuator for fiber-optic switching applications. It consists of two banded silicon wafers. One input fiber with a hemispherical lens at its end and three photodetectors are fabricated on the upper wafer. A movable platform with two gratings and one mirror are fabricated on the lower wafer. When the movable platform is at a certain position, the input beam can be split into three beams by the gratings. Details of the grating switching design, theoretical analysis, fabrication and experimental results are presented in this paper.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ai Qun Liu, Franck Alexis Chollet, Anand Krishna Asundi, and Jianmin Miao "Micro-electro-mechanical fiber optical switches", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369330; https://doi.org/10.1117/12.369330


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