Translator Disclaimer
11 November 1999 Separate measurement of geometrical thickness and refractive index by an interference confocal microscope
Author Affiliations +
Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369325
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
Abstract
In this paper we first survey non-contacting and separate measurement of thickness and refractive index of a transparent plate or film. Then we describe the separate measurement of refractive index and geometrical index and geometrical thickness of multiple layers which uses a combination of confocal microscopy and low-coherence interferometry. The measurement has been accelerated by replacing the low-coherence interferometry by wavelength- scanning heterodyne interferometry using a laser diode. Finally, accuracy of the measurement has been experimentally studied and display of a cross-sectional image of a stack of glass plates has been demonstrated.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Takashi Fukano and Ichirou Yamaguchi "Separate measurement of geometrical thickness and refractive index by an interference confocal microscope", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); https://doi.org/10.1117/12.369325
PROCEEDINGS
13 PAGES


SHARE
Advertisement
Advertisement
Back to Top