11 November 1999 Simultaneous strain and displacement measurements in micromechanics
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Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369335
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
In this paper, two quantitative methods to measure micro- deformation using gratin microscopy are proposed, a grating diffraction method and a full-field grating phase shift method. A compact optical transmitting microscope with white light source is reconstructed by developing a loading and recording system. For direct strain measurement, a grating diffraction method is presented. With the help of a Bertrand lens, the Fourier spectrum of the grating is formed on the CCD sensor plane with high image quality. Software for precise, fast and automatic determination of the diffraction spot centroids is developed. Local strains are thus measured with high resolution. For the deformation measurement, a phase-shifting grating microscope method with high sensitivity and spatial resolution is proposed. Phase shifting is based on the slab refraction effect and is realized via a tilting compensator. The system possesses a high spatial resolution, and a displacement precision of 0.1 to 0.03 micrometers . The combination of the grating diffraction method and the phase shifting method in the same test provides simultaneous measurement of strain and displacement, thus demonstrating that the grating techniques are viable in the microscope environment.
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Bing Zhao, Bing Zhao, Anand Krishna Asundi, Anand Krishna Asundi, "Simultaneous strain and displacement measurements in micromechanics", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369335; https://doi.org/10.1117/12.369335

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