Spectrally resolved white-light interferometry for profilometry with polarization phase shifter

S. Suja Helen; Mahendra P. Kothiyal; Rajpal S. Sirohi

doi:10.1117/12.369373

11 November 1999 Spectrally resolved white-light interferometry for profilometry with polarization phase shifter

S. Suja Helen, Mahendra P. Kothiyal, Rajpal S. Sirohi

Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369373
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

We describe a spectrally resolved white light interferometer with polarization phase shifter for use in surface profiling. Phase shifting is introduced by a rotating half- wave plate. The phase shifted intensity values needed for the phase calculation at each pixel are obtained from the same pixel instead of different pixels, thereby avoiding error due to variation in sensitivities of different pixels.

Citation Download Citation

S. Suja Helen, Mahendra P. Kothiyal, and Rajpal S. Sirohi "Spectrally resolved white-light interferometry for profilometry with polarization phase shifter", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); https://doi.org/10.1117/12.369373

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