11 November 1999 Testing method for microprofile of optical supersmooth surface
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Proceedings Volume 3897, Advanced Photonic Sensors and Applications; (1999) https://doi.org/10.1117/12.369333
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
In this paper, some advantage on testing method for optical supersmooth surface using Atomic Force Microscope (AFM) are presented, and compared with classical interference method. Important applications of AFM for optical technique are introduced in the paper. Some testing results on microprofile and roughness of optical supersmooth surface using AFM method are listed, and it has indicated that result is not obtained with interference method.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jianbai Li, Jianbai Li, Shaorong Xiao, Shaorong Xiao, Xiaoyun Li, Xiaoyun Li, Aihan Ying, Aihan Ying, Xiaoli Zhang, Xiaoli Zhang, Anging Zhuo, Anging Zhuo, } "Testing method for microprofile of optical supersmooth surface", Proc. SPIE 3897, Advanced Photonic Sensors and Applications, (11 November 1999); doi: 10.1117/12.369333; https://doi.org/10.1117/12.369333

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