4 November 1999 New developments and applications in the production of 3D microstructures by laser micromachining
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Proceedings Volume 3898, Photonic Systems and Applications in Defense and Manufacturing; (1999) https://doi.org/10.1117/12.368513
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
Abstract
Micro-machining techniques using pulsed lasers are currently being applied world-wise in many diverse industrial application areas including biomedical devices, printers, flat-panel displays, semiconductors devices and telecommunication systems. In particular, the use of excimer lasers has been at the forefront of the new developments in the manufacture of complex micro-structures for the production of micro-optical-electro-mechanical-systems units such as nozzles, optical devices and sensors. This paper reviews the fundamentals of excimer laser micromachining techniques and details recent developments which have enhanced the capabilities of these approaches. Application areas where these techniques are of interest are highlighted.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nadeem Hasan Rizvi, Nadeem Hasan Rizvi, Phil T. Rumsby, Phil T. Rumsby, Malcolm C. Gower, Malcolm C. Gower, } "New developments and applications in the production of 3D microstructures by laser micromachining", Proc. SPIE 3898, Photonic Systems and Applications in Defense and Manufacturing, (4 November 1999); doi: 10.1117/12.368513; https://doi.org/10.1117/12.368513
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