4 November 1999 Precision of scanning magnetic and electric rheology X-Y-Z manipulators
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Proceedings Volume 3898, Photonic Systems and Applications in Defense and Manufacturing; (1999) https://doi.org/10.1117/12.368491
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore
Abstract
The manipulators of scanning tunneling microscope (STM) usually use 'long-travel' mechanically drived X-Y stages with piezoceramic actuators together with piezoceramic tubes. Magnetic- and electric Rheology manipulators combine the functions of the both drives in single unit and ensure the precision and the length of the travel L <EQ 200 mm along X, Y axes and L <EQ 400 mic along Z axe. Error of positioning of loop-contorlled MR- and ER drive may be expressed.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eugeny A. Deuline, Eugeny A. Deuline, Valeri P. Mikhailov, Valeri P. Mikhailov, Oleg N. Eliseev, Oleg N. Eliseev, Victor V. Sytchev, Victor V. Sytchev, } "Precision of scanning magnetic and electric rheology X-Y-Z manipulators", Proc. SPIE 3898, Photonic Systems and Applications in Defense and Manufacturing, (4 November 1999); doi: 10.1117/12.368491; https://doi.org/10.1117/12.368491
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