InGaAlP quantum well microcavities of circular or deformed disks and disks with microstructures

Bei-Wei Zhang; Guozhong Wang; YunQing Chen; Dai Lun; Wei Fang; Dajun Wang; Yumin Shen; Yi Qian; Shifa Xu; ZhiAn Lai; Xing Zhu; Ruo Peng Wang; Xiaoyu Ma

doi:10.1117/12.369402

9 November 1999 InGaAlP quantum well microcavities of circular or deformed disks and disks with microstructures

Bei-Wei Zhang, Guozhong Wang, YunQing Chen, Dai Lun, Wei Fang, Dajun Wang, Yumin Shen, Yi Qian, Shifa Xu, ZhiAn Lai, Xing Zhu, Ruo Peng Wang, Xiaoyu Ma

Author Affiliations +

Proceedings Volume 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures; (1999) https://doi.org/10.1117/12.369402
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

OPtical microdisk is based on circularly symmetric micro- resonator and featured of the 'whispering-galley' modes with high quality of factor Q. However, the non-preferred directional emission and lack of high output from the disk are its drawbacks for application. Recently, a remarkable advance in the novel deformed microdisk laser at middle-IR wavelength is highly attractive. In this report, as a preliminary try for microdisk at visible range, the InGaAlP quantum well circular cylindrical and deformed microdisks with radii about 2.5 to 10 micrometers emitting at wavelength of 0.62-0.67 micrometers were prepared by electron beam lithography and wet etching processing etc. The optical emission properties of these microdisks and studied by employing the scanning electron microscopy, atomic force microscopy, fluorescence image microspace and scanning near-field optical microscopy etc. The preferential emission in these deformed microdisks was visually observed. When the cross section of microdisk was gradually deformed from circle, the change of fluorescence image from uniform ring towards 2 or 4 favorable emission along the circumference of microdisks was confirmed. The deformation could be caused by either the shape or etching profile of the disk waveguide. In addition, the microdisks patterned with some microstructures were proposed.

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Bei-Wei Zhang, Guozhong Wang, YunQing Chen, Dai Lun, Wei Fang, Dajun Wang, Yumin Shen, Yi Qian, Shifa Xu, ZhiAn Lai, Xing Zhu, Ruo Peng Wang, and Xiaoyu Ma "InGaAlP quantum well microcavities of circular or deformed disks and disks with microstructures", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369402

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