9 November 1999 Micromirror actuation with electrostatic force and plate bending
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Abstract
In this paper, a new method for actuating micro-mirrors, which utilizes bending of the micro-mirror plate, was proposed in order to increase the rotational angle without increasing the sacrificial layer thickness. The analytical model of the proposed actuating method was established and, based on the analytical model, the expected micro-mirror operation is presented. In order to confirm the expected operation surface-micromachined polysilicon micro-mirror operation is presented. In order to confirm the expected operation surface micromachined polysilicon micro-mirror was fabricated and tested. The bending of the micro-mirror plate, however, was not observed in the experiment with the fabricated micro-mirror. There are two possible reasons for this. One is the driving force reduction due to the decreasing of the voltage difference between the micro- mirror plate and underlying electrode caused by electrical conducting between the two. The other is the non-optimized design in the mechanical structure which caused the bending of the supporting beam before the plate starts to bend.
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Seungoh Han, Seungoh Han, HoJoon Park, HoJoon Park, James Jungho Pak, James Jungho Pak, } "Micromirror actuation with electrostatic force and plate bending", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); doi: 10.1117/12.369383; https://doi.org/10.1117/12.369383
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