Normal-incident SiGe/Si MQW photodetectors operating at 1.3 um

Buwen Cheng; Chengfang Li; Qingqing Yang; Hongjie Wang; Liping Luo; Jinzhong Yu; Qiming Wang

doi:10.1117/12.369415

9 November 1999 Normal-incident SiGe/Si MQW photodetectors operating at 1.3 μm

Buwen Cheng, Chengfang Li, Qingqing Yang, Hongjie Wang, Liping Luo, Jinzhong Yu, Qiming Wang

Proceedings Volume 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures; (1999) https://doi.org/10.1117/12.369415
Event: International Symposium on Photonics and Applications, 1999, Singapore, Singapore

Abstract

A normal-incident SiGe/Si multiple quantum wells photodetector was reported. The structure and fabrication process of the photodetector were introduced. The photocurrent spectra measurement showed that the response spectra was expanded to 1.3 micrometers wavelength. The quantum efficiency of the photodetector was 0.1 percent at 1.3 micrometers and 20 percent at 0.95 micrometers .

Citation Download Citation

Buwen Cheng, Chengfang Li, Qingqing Yang, Hongjie Wang, Liping Luo, Jinzhong Yu, and Qiming Wang "Normal-incident SiGe/Si MQW photodetectors operating at 1.3 μm", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369415

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