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9 November 1999 Plane wave quantity and its measurement of plate working surface
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Abstract
This paper deals with the assay requirements and the method of plane. Wave quantity of the plate working surface according to the National Standards of 'cast iron plate' and 'rock plate', derives in detail, the detecting principle of plane wave detector and gives out the relationship between the partial plane error and the partial defect of the plate and the plane wave quantity. It also inquires into the relationship between the contact spot and 200 mm straight line wave and plane wave quantity.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jun-Qi Liu, Yanan Liu, Linxiang Cao, and XiaoMing Zhao "Plane wave quantity and its measurement of plate working surface", Proc. SPIE 3899, Photonics Technology into the 21st Century: Semiconductors, Microstructures, and Nanostructures, (9 November 1999); https://doi.org/10.1117/12.369440
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