3 March 2000 Recent advances in laser spallation technique for measurement of interfacial strength in thin films and multilayers (Abstract Only)
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Abstract
Recent developments in the laser spallation technique to measure the tensile strength of thin film interfaces will be presented. In this technique, a laser-generated stress wave in the substrate pries off the coating deposited on its free surface. The interface strength is quantified by recording the free surface velocity of the coating using an interferometer. Examples from metal/ceramic, ceramic/oxide and polymer/semiconductor interface systems will be presented to demonstrate the ability of the technique to pick up strength changes resulting of interfacial adhesion. The sensitivity of the technique to pick up strength changes resulting from different processes and surface variables will be demonstrated. Potential application of the technique to measure the strength and reliability of interfaces in geometrically heterogeneous multilayer ICs and electronic substrate structures will also be discussed.
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Vijay Gupta, Vijay Gupta, } "Recent advances in laser spallation technique for measurement of interfacial strength in thin films and multilayers (Abstract Only)", Proc. SPIE 3902, Laser-Induced Damage in Optical Materials: 1999, (3 March 2000); doi: 10.1117/12.379332; https://doi.org/10.1117/12.379332
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